首页>
外国专利>
Method for determining spatially resolved height information of a sample using a wide field microscope and a wide field microscope
Method for determining spatially resolved height information of a sample using a wide field microscope and a wide field microscope
展开▼
机译：使用广角显微镜和广角显微镜确定样品的空间分辨高度信息的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention relates to a wide field microscope and a method for determining spatially resolved height information of a sample (14) using a wide field microscope. In the wide-field microscope, an irradiation source (1, 52, 53) arranged in the irradiation beam path and a wide-field image in the observation beam path of the sample (14) irradiated in the sample surface (P) are displayed. A detector (17, 33) for capturing, a modulator for color modulation in a direction perpendicular to the sample plane (P) of the illumination beam path or the observation beam path, and each of the wide-field images And an evaluation unit for calculating chromatic confocal height information within the pixel. The method comprises using any broadband illumination source (1) to illuminate the sample (14) in an illumination beam path, color modulating the illumination beam path or detection beam path, and the detection beam path. Capturing at least one wide-field image from sample light having a chromatic confocal component reflected or emitted from the sample in the image, and from the wide-field image, the chromatic confocal component of the detection beam path and the color modulation And determining various height information of the sample for each pixel.
展开▼
