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SECONDARY ION MASS ANALYZING METHOD, SECONDARY ION MASS ANALYSIS PROGRAM AND SECONDARY ION MASS ANALYZER
SECONDARY ION MASS ANALYZING METHOD, SECONDARY ION MASS ANALYSIS PROGRAM AND SECONDARY ION MASS ANALYZER
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机译：二次离子质量分析方法，二次离子质量分析程序和二次离子质量分析仪
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摘要
PROBLEM TO BE SOLVED: To provide a method for correctly grasping the deviation of an acceleration voltage of a primary ion beam and controlling a scanning width of a primary ion beam without depending on the change in acceleration voltage in regard to a secondary ion mass analysis.SOLUTION: A secondary ion mass analyzing method comprises the steps of: using a primary ion beam accelerated by a set acceleration voltage Vto scan a surface of a sample with a set scanning width y(set) determined by a relational expression of the set acceleration voltage Vand a voltage Vapplied to a deflection electrode; actually measuring a width y of a crater, formed accompanying the emission of a secondary ion beam generated as a result of the scan, in a scan direction, and an energy V' of the primary ion beam at an extraction electrode position; evaluating an energy V of the primary ion beam at the position of the deflection electrode from the relation between the measured width y and energy V' based on the relational expression; determining a difference δV(=V'-V) between the energy V and the energy V'; and changing a voltage to be applied to the deflection electrode from Vto V' so that the width y of the crater in the scan direction becomes the set scanning width y(set).SELECTED DRAWING: Figure 1
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