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SECONDARY ION MASS ANALYSIS METHOD AND SECONDARY ION MASS ANALYSIS APPARATUS
SECONDARY ION MASS ANALYSIS METHOD AND SECONDARY ION MASS ANALYSIS APPARATUS
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机译:二次离子质量分析方法和二次离子质量分析装置
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摘要
PROBLEM TO BE SOLVED: To provide a technology for secondary ion mass analysis that is capable of accurately performing element distribution measurement in a depth direction, in a sample having an outermost surface easily affected by oxidation or the like.;SOLUTION: A secondary ion mass analysis method includes the steps of: comparing first spectra that indicate sample voltage dependency of the count number of secondary ions generated from the outermost surface of a sample at primary ion irradiation, with second spectra generated from the place where the sample is not oxidized; acquiring a sample voltage corresponding to a spectral range with no enhancement effect due to oxygen from the first and second spectra; and measuring element distribution in the depth direction of the sample in the sample voltage.;COPYRIGHT: (C)2013,JPO&INPIT
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