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CONTROL DEVICE, CIRCUIT BOARD INSTALLED AT SAID CONTROL DEVICE AND VACUUM PUMP APPLIED WITH SAID CONTROL DEVICE
CONTROL DEVICE, CIRCUIT BOARD INSTALLED AT SAID CONTROL DEVICE AND VACUUM PUMP APPLIED WITH SAID CONTROL DEVICE
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机译:控制装置,安装在所述控制装置上的电路板以及应用于所述控制装置的真空泵
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摘要
PROBLEM TO BE SOLVED: To provide a control device having a simple heat radiation structure enabling a cost at the time of replacement of its component element to be reduced in which a smaller type pump than that of the prior art can be constituted and its manufacturing can be carried more easily, a circuit board installed at said control device and a vacuum pump applied with said control device.SOLUTION: A driving current amplifier 5 including FET for use in flowing electric current against an electro-magnet 104 of a magnet bearing or the like and a driving current amplifier 7 including FET for use in flowing electric current against a three-phase motor 121 are installed on one power substrate 21. In turn, a magnet bearing floating control 6 composed of light current elements including a digital circuit or a sensor circuit for use in controlling floating of the magnetic bearing and light current elements including a digital circuit or a sensor circuit requisite for a rotating speed control 8 against the motor 121 are installed on one control board 23. Since only power substrate 21 includes the power element, only this power substrate 21 has a short life due to heat and it is easily troubled in operation. The power substrate 21 is fixed against a frame 12 through a heat radiation sheet 24.SELECTED DRAWING: Figure 2
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