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VACUUM DRYING APPARATUS AND SERIAL VACUUM DRYING PROCESS SYSTEM USING VACUUM DRYING APPARATUS
VACUUM DRYING APPARATUS AND SERIAL VACUUM DRYING PROCESS SYSTEM USING VACUUM DRYING APPARATUS
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机译：真空干燥设备和使用真空干燥设备的串行真空干燥过程系统
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摘要
The present invention relates to a vacuum drying apparatus and a serial vacuum drying process system using a vacuum drying apparatus and, more specifically, to a vacuum drying apparatus and a serial vacuum drying process system using a vacuum drying apparatus, which can improve the heat treatment efficiency of a process object compared to a general heat treatment in a vacuum state by transmitting thermal energy through convection as well as radiation and adding gas supplied with the thermal energy to a heat treatment process in the process of heat-treating the process object in a vacuum state and can continuously perform the vacuum drying process of the process object without opening a cover of the vacuum drying apparatus by disposing access units and process robots on both sides of the vacuum drying apparatus. The access units block the inside of a drying unit from the outside when the process object is heat-treated inside the drying unit.;COPYRIGHT KIPO 2016
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