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Method for doping an active Hall effect region of a Hall effect device and Hall effect device having a doped active Hall effect region
Method for doping an active Hall effect region of a Hall effect device and Hall effect device having a doped active Hall effect region
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机译：掺杂霍尔效应器件的有源霍尔效应区的方法和具有掺杂的有源霍尔效应区的霍尔效应器件
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摘要
Methods for doping an active Hall effect region of a Hall effect device in a semiconductor substrate, and Hall effect devices having a doped active Hall effect region are provided. A method includes forming a first doping profile of a first doping type in a first depth region of the active Hall effect region by means of a first implantation with a first implantation energy level, forming a second doping profile of the first doping type in a second depth region of the active Hall effect region by means of a second implantation with a second implantation energy level, and forming an overall doping profile of the active Hall effect region by annealing the semiconductor substrate with the active Hall effect region having the first and the second doping profile.
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