首页>
外国专利>
Diffractive optical element, manufacturing method of diffractive optical element, design apparatus of diffractive optical element, and object detection apparatus
Diffractive optical element, manufacturing method of diffractive optical element, design apparatus of diffractive optical element, and object detection apparatus
展开▼
机译：衍射光学元件，衍射光学元件的制造方法，衍射光学元件的设计装置以及物体检测装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To widen an irradiation range of a periodic pattern formed by a diffraction grating.SOLUTION: A first pattern P1 and a second pattern P2 are arranged so that a third pattern P3 is formed. The third pattern P3 includes first small patterns P1a, P1b, and P1c and second small patterns P2a, P2b, and P2c. In the third pattern P3, the first small patterns P1a, P1b, and P1c and the second small patterns P2a, P2b, and P2c are integrated to form a periodic pattern (the third pattern P3). The third pattern P3 is arrayed along a direction DR.
展开▼
