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DIFFRACTION OPTICAL ELEMENT, METHOD OF MANUFACTURING THE DIFFRACTION OPTICAL ELEMENT, DESIGN DEVICE FOR THE DIFFRACTION OPTICAL ELEMENT, AND OBJECT DETECTION DEVICE
DIFFRACTION OPTICAL ELEMENT, METHOD OF MANUFACTURING THE DIFFRACTION OPTICAL ELEMENT, DESIGN DEVICE FOR THE DIFFRACTION OPTICAL ELEMENT, AND OBJECT DETECTION DEVICE
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机译：衍射光学元件，制造该衍射光学元件的方法，该衍射光学元件的设计装置以及对象检测装置
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摘要
PROBLEM TO BE SOLVED: To widen an irradiation range of a periodic pattern formed by a diffraction grating.;SOLUTION: A first pattern P1 and a second pattern P2 are arranged so that a third pattern P3 is formed. The third pattern P3 includes first small patterns P1a, P1b, and P1c and second small patterns P2a, P2b, and P2c. In the third pattern P3, the first small patterns P1a, P1b, and P1c and the second small patterns P2a, P2b, and P2c are integrated to form a periodic pattern (the third pattern P3). The third pattern P3 is arrayed along a direction DR.;COPYRIGHT: (C)2015,JPO&INPIT
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