A THREE AXIS CAPACITIVE MEMS ACCELEROMETER ON A SINGLE SUBSTRATE

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  机译： 单基板上的三轴电容MEMS加速度计

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  机译： 具有双向挠曲的高灵敏度单轴MEMS加速度计

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  机译： 两轴电容式加速度传感器和两轴电容式加速度计

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