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Design of an SOI-MEMS high resolution capacitive type single axis accelerometer

机译：SOI-MEMS高分辨率电容式单轴加速度计的设计

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摘要

In recent years, high resolution micro accelerometers are increasingly finding various applications in different segments of life. The current work deals with the design of a high resolution single axis accelerometer based on SOI-MEMS technology. Accordingly two different approaches for designing comb type, capacitive, SOI-MEMS accelerometer is presented. Initially a system level approach using a simulation platform from SABER is carried out to obtain the basic design. Later, a device level design is carried out by building three dimensional (3D) geometric models using finite element (FE) simulations through CoventorWare software. Different design parameters like mechanical and electrical sensitivity, capacitance values, resonant frequency, etc. are obtained in either of the cases and compared. The design is optimized based on the overall sensitivity and the system noise level both electrical and mechanical, respectively. The complete design is worked out in accordance with the silicon on insulator based multiuser MEMS fabrication processes (MUMPs) technology from MEMSCAP foundry.
机译：近年来，高分辨率微型加速度计在生活的不同部分中越来越多地发现各种应用。当前的工作涉及基于SOI-MEMS技术的高分辨率单轴加速度计的设计。因此，提出了两种设计梳型，电容性SOI-MEMS加速度计的方法。最初，使用来自SABRE的仿真平台进行了系统级的方法以获得基本设计。后来，通过使用CoventorWare软件使用有限元（FE）模拟来构建三维（3D）几何模型，从而进行了设备级设计。在任何一种情况下都可以获取不同的设计参数，例如机械和电气灵敏度，电容值，谐振频率等，并进行比较。该设计基于电气和机械的总体灵敏度和系统噪声水平进行了优化。完整的设计是根据MEMSCAP铸造厂基于绝缘体上硅的多用户MEMS制造工艺（MUMPs）技术制定的。

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