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Brief description of embodiments improved of elements suspended structure of different thicknesses for mems and 'nems '
Brief description of embodiments improved of elements suspended structure of different thicknesses for mems and 'nems '
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机译：实施例的简要说明改进了用于记忆和“记忆”的不同厚度的元件悬挂结构
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摘要
Method for making a N/MEMS device including a structure provided with an active part having a first suspended element and a second suspended element with different thicknesses, the method comprising the following steps of: forming, in a first substrate (100), a sacrificial zone (105), transferring a given layer onto the sacrificial zone, defining in said given layer a first suspended element facing the first sacrificial zone, defining a second suspended element in the first substrate and said given layer, releasing at least the first suspended element.
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