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Brief description of embodiments improved of elements suspended structure of different thicknesses for mems and 'nems '
Brief description of embodiments improved of elements suspended structure of different thicknesses for mems and 'nems '
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机译：实施例的简要说明改进了用于记忆和“记忆”的不同厚度的元件悬挂结构
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摘要
Method of producing a device / mems comprising a structure which is provided with an active part having a first element and a second suspended element of different thicknesses, the method comprising the following steps: - form in a first substrate (100), a sacrificial area (105), - made of a given layer on the sacrificial area, - define in the said layer is given a first suspended element facing the first sacrificial area, - define a second element is suspended in the first substrate and the said given layer, - liberate at least the first element of the suspended.
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