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METHOD FOR PROCESSING BEAM neutral particles based on the technology GAS PROCESSING BEAM cluster ions, and the thus obtained ARTICLES
METHOD FOR PROCESSING BEAM neutral particles based on the technology GAS PROCESSING BEAM cluster ions, and the thus obtained ARTICLES
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机译：基于气体加工束簇离子技术的束流中性颗粒的加工方法，以及由此获得的文章
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摘要
1. A method for surface treatment of the optical element, the method comprising: providing a chamber with reduced pressure, forming gas cluster ion beam comprising gas cluster ions in the chamber to a reduced pressure; accelerated gas cluster ions to form a beam of accelerated gas cluster ion beam along a path within the chamber with reduced pressure, stimulate fragmentation and / or dissociation of at least part of the accelerated gas cluster ion beam along a path; removed charged ca with a particle beam path to form a neutral beam accelerated along the beam path in a chamber with reduced pressure, the optical element is held on the beam trajectory; treated with at least part of the surface of the optical element by irradiating it with accelerated neutral beam; and wherein the steps of incentives and removal performed before poverhnosti.2 irradiation. A method according to Claim. 1, wherein in removing step removed substantially all of the charged particles trajectory puchka.3. A method according to Claim. 1, wherein the neutral beam does not substantially contain clusters intermediate razmerov.4. A method according to Claim. 1, wherein the neutral beam consists essentially of a gas from gas cluster beam ionov.5. A method according to Claim. 1, wherein the stimulating step includes increasing the accelerating voltage for stage acceleration or improvement of ionization efficiency in forming gas cluster beam ionov.6. A method according to Claim. 1, wherein the stimulating step includes expanding the range of the ion velocity in an accelerated gas cluster beam ionov.7. A method according to Claim. 1, wherein the stimulating step comprises administering to a one
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