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MANUFACTURING METHOD OF CATALYST-FREE SUBSTRATE GROWN GRAPHENE, CATALYST-FREE SUBSTRATE GROWN GRAPHENE, AND MANUFACTURING DEVICE
MANUFACTURING METHOD OF CATALYST-FREE SUBSTRATE GROWN GRAPHENE, CATALYST-FREE SUBSTRATE GROWN GRAPHENE, AND MANUFACTURING DEVICE
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机译：无催化剂基质生长石墨烯的制造方法，无催化剂基质生长石墨烯的制造装置
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摘要
Provided are a manufacturing method of catalyst-free substrate grown graphene, the catalyst-free substrate grown graphene, and a manufacturing device. The manufacturing method of catalyst-free substrate grown graphene of the present invention comprises the following steps: a. arranging a substrate; b. supplying carbon-containing gas and performing inductively coupled plasma-chemical vapor deposition (ICP-CVD); and c. growing graphene on the substrate without having a catalyst layer through van der Waals type heteroepitaxial growth.;COPYRIGHT KIPO 2016
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