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CYLINDRICAL ULTRA-PRECISION MAGNETIC LEVITATION STAGE
CYLINDRICAL ULTRA-PRECISION MAGNETIC LEVITATION STAGE
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机译：圆柱超精密磁悬浮阶段
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摘要
The present invention relates to a cylindrical ultra-precision magnetic levitation stage and, more specifically, relates to a cylindrical ultra-precision magnetic levitation stage which can prevent disturbance of a vehicle as an attractive force and a repulsive force are constantly generated by an arrangement type of a magnetic levitation module when being operated by an operator. The present invention provides the cylindrical ultra-precision magnetic levitation stage which comprises: an operation unit wherein a first operating element and a second operating element are installed in a cylindrical body; a magnetic levitation unit levitating the operation unit to do rotary and rectilinear motion with a magnetic force; and an auxiliary magnetic levitation unit wherein a first auxiliary magnetic levitation module and a second auxiliary magnetic levitation module are individually provided.;COPYRIGHT KIPO 2016
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