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Thermo-optical array devices and methods of processing thermo-optical array devices
Thermo-optical array devices and methods of processing thermo-optical array devices
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机译:热光阵列装置和处理热光阵列装置的方法
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摘要
Thermo-optical array devices and methods of processing thermo-optical array devices are disclosed. One method of processing thermo-optical array devices includes forming a (001) oriented titanium dioxide material on a bolometer material, and forming a vanadium dioxide material on the (001) oriented titanium dioxide material. One thermo-optical array device includes a bolometer material, a titanium dioxide material on the bolometer material, and a vanadium dioxide material on the titanium dioxide material, wherein the vanadium dioxide material has an optical transition temperature of less than 67 degrees Celsius.
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