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USE OF AN ETCH STOP IN THE MIM CAPACITOR DIELECTRIC OF A MMIC
USE OF AN ETCH STOP IN THE MIM CAPACITOR DIELECTRIC OF A MMIC
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机译：在MMIC的MIM电容器电介质中使用止动块
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摘要
A structure having; a body; a pair of capacitors disposed over different portions of a surface of the body; a first one of the capacitors having an upper conductor and a lower conductor separated a dielectric layer; and a second one of the pair of capacitors having an upper conductor and a lower conductor separated a dielectric structure, the dielectric structure having a lower dielectric layer, and an upper dielectric layer, wherein the material of the lower dielectric layer is different from the material of the upper dielectric layer.
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