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Electron beam irradiation device, a multi-electron-beam irradiation device, an electron beam exposure apparatus, and electron beam irradiation method
Electron beam irradiation device, a multi-electron-beam irradiation device, an electron beam exposure apparatus, and electron beam irradiation method
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机译：电子束照射装置，多电子束照射装置，电子束曝光装置以及电子束照射方法
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摘要
PROBLEM TO BE SOLVED: To provide a compact electron beam irradiation device in which throughput of an electron beam exposure device is enhanced.SOLUTION: The electron beam irradiation device outputing a plurality of electron beams includes a surface electron beam source having a plurality of electron emission parts which focuses electrons emitted, respectively, from the plurality of electron emission parts while accelerating and outputs as a plurality of electron beams, and an electron lens for irradiating an object with a drawing pattern formed of the plurality of electron beams output from the surface electron beam source with a predetermined magnification.
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