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ELECTRON BEAM IRRADIATION DEVICE, MULTI ELECTRON BEAM IRRADIATION DEVICE, ELECTRON BEAM EXPOSURE SYSTEM, AND ELECTRON BEAM IRRADIATION METHOD
ELECTRON BEAM IRRADIATION DEVICE, MULTI ELECTRON BEAM IRRADIATION DEVICE, ELECTRON BEAM EXPOSURE SYSTEM, AND ELECTRON BEAM IRRADIATION METHOD
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机译:电子束辐照设备,多电子束辐照设备,电子束曝光系统和电子束辐照方法
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摘要
PROBLEM TO BE SOLVED: To provide a compact electron beam irradiation device in which throughput of an electron beam exposure device is enhanced.;SOLUTION: The electron beam irradiation device outputing a plurality of electron beams includes a surface electron beam source having a plurality of electron emission parts which focuses electrons emitted, respectively, from the plurality of electron emission parts while accelerating and outputs as a plurality of electron beams, and an electron lens for irradiating an object with a drawing pattern formed of the plurality of electron beams output from the surface electron beam source with a predetermined magnification.;COPYRIGHT: (C)2013,JPO&INPIT
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