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Method and apparatus for film thickness measurement using white light scanning interferometry
Method and apparatus for film thickness measurement using white light scanning interferometry
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机译：使用白光扫描干涉仪测量膜厚的方法和设备
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摘要
PROBLEM TO BE SOLVED: To provide a method for using broadband interferometry to measure thickness of a transparent film.;SOLUTION: A method includes: a step for generating a correlogram of a film by using broadband interferometry; a step for applying a Fourier transform to the correlogram and obtaining a Fourier phase function; a step for removing a linear component of the Fourier phase function; a step for applying a second integral transform to a remaining non-linear component and obtaining an integral amplitude function of the non-linear component; a step for specifying a peak position of the integral amplitude function; and a step for determining thickness of the film as a double value of abscissa at the peak position in consideration of a refraction index of the film depending on a wavelength. Instead of the last two steps, the method may include a step for specifying a peak position of the integral amplitude function and a step for determining thickness of the film as a double value of abscissa at the peak position.;COPYRIGHT: (C)2012,JPO&INPIT
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