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Chemical precursor evaporation source for transporting, and evaporation method for conveying chemical precursors using the evaporation source
Chemical precursor evaporation source for transporting, and evaporation method for conveying chemical precursors using the evaporation source
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机译：用于输送的化学前驱体蒸发源以及使用该蒸发源的化学前驱体的蒸发方法
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摘要
The present invention is a chemical precursor to a vapor source for conveying the substrate on which the precursor is deposited by concentration, heating means stores the precursor to the lower part (8) presenting the evaporation source formed by the main tube (1) having. The upper portion of the main tube (1), the carrier gas inlet (5) and outlet (6) is arranged, and the inlet (5) and an outlet (6), the main tube (1) of the side surface (7), opposite each other, it is positioned in a row along a common line across the side surface (7) of the main tube (1). The present invention also presents the evaporation method for transporting a chemical precursor, introduction and extraction of the carrier gas from the main tube (1) traverses the lateral surface of the main tube (1) (7) It is performed in a row direction.
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