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Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit
Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit
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机译：使用形成为集成电路的压电致动器的可变形镜的使用方法
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摘要
A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.
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