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Circuit and Method for Internally Assessing Dielectric Reliability of a Semiconductor Technology
Circuit and Method for Internally Assessing Dielectric Reliability of a Semiconductor Technology
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机译：内部评估半导体技术介电可靠性的电路和方法
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摘要
A semiconductor wafer includes dielectric regions of different thicknesses, some of the dielectric regions being thinner and other ones of the dielectric regions being thicker. The semiconductor wafer further includes a stress circuit operable to stress at least one of the dielectric regions internally within the semiconductor wafer for assessing dielectric reliability. A corresponding method of internally assessing dielectric reliability of a semiconductor technology is also provided.
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