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Three -dimensional microstructure , assembly with a microstructure of at least two three -dimensional , use of the methods and microstructure for the fabrication of microstructures
Three -dimensional microstructure , assembly with a microstructure of at least two three -dimensional , use of the methods and microstructure for the fabrication of microstructures
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机译:三维微观结构,具有至少两个三维的微观结构的组装,该方法和微观结构在制造微观结构中的用途
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摘要
A three-dimensional micro-structure has a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension. The micro-columns are made of at least one micro-column material having respectively an aspect ratio in the region of 20-1000 and respectively a micro-column diameter in the region of 0.1 μm-200 μm. A micro-column intermediate chamber is arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 μm-100 μm. According to a method for producing the three-dimensional micro-structures: a) a template is provided with template material, b) the micro-column material is arranged in the column-like cavities, and c) the template is at least partially removed.
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