首页>
外国专利>
Ge-Sb-Te film deposition methods, Ge-Te film deposition methods, of Sb-Te film film forming method and program
Ge-Sb-Te film deposition methods, Ge-Te film deposition methods, of Sb-Te film film forming method and program
展开▼
机译：Ge-Sb-Te成膜方法，Ge-Te成膜方法，Sb-Te成膜方法及程序
展开▼
页面导航
摘要
著录项
相似文献
摘要
And Sb raw material introduction step, a first purge step, and Te raw material introduction step a second purge step, and a Ge raw material introduction step, wherein a third purge step, at least one step of the raw material introduction step, or purge step, ammonia, methylamine, dimethylamine, hydrazine, monomethyl hydrazine introduces additional gas containing one or more dimethylhydrazine and pyridine, method of forming the Ge-Sb-Te film is provided.
展开▼
