首页> 外国专利> Electricity - methods of making machine conversion film, electrical - electrical equipped with a mechanical conversion film - mechanical conversion element, a liquid discharge head having a the element, a liquid ejecting apparatus having a liquid ejection head

Electricity - methods of making machine conversion film, electrical - electrical equipped with a mechanical conversion film - mechanical conversion element, a liquid discharge head having a the element, a liquid ejecting apparatus having a liquid ejection head

机译：电气-机械转换膜的制造方法，电气-具备机械转换膜的电气设备-机械转换元件，具有该元件的排液头，具有排液头的排液装置

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PPROBLEM TO BE SOLVED: To provide a manufacturing method capable of easily producing an electromechanical conversion film constructing an electromechanical conversion device and reducing a use material, a liquid jet head having the device and a liquid ejecting apparatus having the head. PSOLUTION: The method comprises step (1) of forming a surface modification area on a region on a first electrode other than a region where an electromechanical conversion film is provided, by applying preliminarily a surface modification liquid by the inkjet method; step (2) of applying a sol-gel liquid containing a piezoelectric precursor on a portion on the first electrode as a not-surface modification region where the electromechanical conversion film is provided, by the inkjet method; and step (3) of heating and processing the sol-gel applied film to constructs an electromechanical conversion device by forming a patterned electromechanical conversion film. When the electromechanical conversion film is thickened, the step (2) and the step (3) are repeated. It is applied for a liquid jet head and a liquid ejecting apparatus. PCOPYRIGHT: (C)2011,JPO&INPIT

机译：解决的问题：提供一种能够容易地制造构成机电转换装置并减少使用材料的机电转换膜的制造方法，具有该装置的液体喷射头和具有该头的液体喷射装置。

解决方案：该方法包括步骤（1），通过喷墨方法预先施加表面改性液，从而在第一电极上除设置有机电转换膜的区域之外的区域上形成表面改性区域;步骤（2）通过喷墨法在第一电极上的设置有机电转换膜的非表面改性区域的部分上涂布含有压电前体的溶胶-凝胶液;步骤（3），通过形成图案化的机电转换膜，对溶胶凝胶涂布膜进行加热处理，从而构成机电转换装置。当机电转换膜变厚时，重复步骤（2）和步骤（3）。适用于液体喷射头和液体喷射装置。

版权：（C）2011，日本特许厅＆INPIT 展开▼

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公开/公告号JP5788137B2

专利类型
公开/公告日2015-09-30

原文格式PDF
申请/专利权人株式会社リコー;
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申请/专利号JP20090264932
发明设计人下福光;町田治;秋山善一;上田恵司;木平孝和;
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申请日2009-11-20
分类号H01L41/318;B41J2/04;H01L41/09;H01L41/187;
国家 JP
入库时间 2022-08-21 15:30:04

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