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equivalent circuit parameter measurement device and an equivalent circuit parameter measurement method
equivalent circuit parameter measurement device and an equivalent circuit parameter measurement method
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机译：等效电路参数测量装置及等效电路参数测量方法
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摘要
PROBLEM TO BE SOLVED: To measure a parameter value of the same value as another measuring apparatus when a parameter of an equivalent circuit is measured for the same sample.;SOLUTION: A processing section 6 executes frequency characteristic data acquisition processing, frequency characteristic data correction processing and parameter correction processing. In the frequency characteristic data acquisition processing, measurement frequency characteristic data DFb indicating impedance Zb and a phase θb in each frequency of a sample 8 are acquired. In the frequency characteristic data correction processing, the impedance Zb indicated by the acquired measurement frequency characteristic data DFb is multiplied by an impedance correction coefficient (m) for correction into correction impedance Zb1 and a phase correction value (n) is added to the phase θb indicated by the measurement frequency characteristic data DFb for correction into a correction phase θb1, thereby calculating correction frequency characteristic data DFb1. In the parameter correction processing, parameter values DLb1, DCb1, DRb1 of parameters of an equivalent circuit of the sample 8 are calculated on the basis of the correction frequency characteristic data DFb1 and multiplied by parameter correction values kL, kC, kR for correction.;COPYRIGHT: (C)2013,JPO&INPIT
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机译：解决的问题：当对相同样本测量等效电路的参数时，测量与另一测量设备相同值的参数值;解决方案：处理部分6执行频率特性数据获取处理，频率特性数据校正处理和参数校正处理。在频率特性数据获取处理中，表示样本的每个频率中的阻抗Z b 和相位θ b 的测量频率特性数据D Fb 获得8个。在频率特性数据校正处理中，将由获取的测量频率特性数据D Fb 表示的阻抗Z b 乘以用于校正的阻抗校正系数（m）。阻抗Z b1 和相位校正值（n）添加到由测量频率特性数据D Fb 表示的相位θ b 进入校正相位θ b1 ，从而计算出校正频率特性数据D Fb1 。在参数校正处理中，计算样本8的等效电路的参数的参数值D Lb1 ，D Cb1 ，D Rb1 。校正频率特性数据D Fb1 的基础并乘以参数校正值k L ，k C ，k R ;版权所有：（C）2013，JPO＆INPIT
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