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METHOD FOR EVALUATING ADHESIVE FORCE OF MICRO-ATTACHMENTS, METHOD FOR EVALUATING HARDNESS OF MICRO-ATTACHMENTS, APPARATUS FOR EVALUATING ADHESIVE FORCE OF MICRO-ATTACHMENTS, AND APPARATUS FOR EVALUATING HARDNESS OF MICRO-ATTACHMENTS
METHOD FOR EVALUATING ADHESIVE FORCE OF MICRO-ATTACHMENTS, METHOD FOR EVALUATING HARDNESS OF MICRO-ATTACHMENTS, APPARATUS FOR EVALUATING ADHESIVE FORCE OF MICRO-ATTACHMENTS, AND APPARATUS FOR EVALUATING HARDNESS OF MICRO-ATTACHMENTS
PROBLEM TO BE SOLVED: To provide a method for easily evaluating the adhesive force or hardness of micro-attachments on a substrate surface.;SOLUTION: A method for evaluating the adhesive force of micro-attachments on a substrate surface to assess the physical property values of the micro-attachments comprises scanning micro-attachments on the substrate surface by applying a perpendicular force to a cantilever, repeating the scanning step with the perpendicular force at an increased level until the micro-attachments begin to move on the substrate surface and identifying the level of the perpendicular force at which the micro-attachments begin to move on the substrate surface, and evaluating the force of adhesion of the micro-attachments to the substrate on the basis of the level of the perpendicular force at which the micro-attachments began to move on the substrate surface.;COPYRIGHT: (C)2015,JPO&INPIT
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