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SIMS ANALYSIS METHOD AND SIMS ANALYSIS DEVICE
SIMS ANALYSIS METHOD AND SIMS ANALYSIS DEVICE
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机译：SIMS分析方法及SIMS分析装置
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摘要
PROBLEM TO BE SOLVED: To provide a SIMS analysis method capable of preventing contamination of a solid sample as a measuring object, stably fixing the solid sample, and exhibiting sufficient contrast, and provide a SIMS analysis device for analyzing a solid sample by the SIMS analysis method.;SOLUTION: In the method of analyzing a solid sample by SIMS, as a fixing member for fixing the solid sample, a fixing member including, on its surface, a fibrous columnar structure having a plurality of fibrous columns of a length of 200 μm or more is used. The SIMS analysis device analyzes a solid sample by SIMS, and includes a fixing member for fixing the solid sample. The fixing member includes, on its surface, a fibrous columnar structure having a plurality of fibrous columns of a length of 200 μm or more.;COPYRIGHT: (C)2016,JPO&INPIT
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