首页> 外国专利> Solar absorber layer system on substrate, comprises base layer which is highly reflective in infrared region, absorber layer formed as cermet gradient layer with metallic- and ceramic components, and reflection-increasing coating layer

Solar absorber layer system on substrate, comprises base layer which is highly reflective in infrared region, absorber layer formed as cermet gradient layer with metallic- and ceramic components, and reflection-increasing coating layer

机译：基板上的太阳能吸收层系统，包括在红外区域具有高反射率的基础层，形成为具有金属和陶瓷成分的金属陶瓷梯度层的吸收层以及增加反射的涂层

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摘要

Solar absorber layer system on a substrate, comprises a base layer which is highly reflective in infrared region, and arranged upstream of the substrate, an absorber layer which is formed as a gradient layer, preferably a cermet gradient layer having metallic- and ceramic components, and arranged above the base layer, and a reflection-increasing coating layer arranged above the absorber layer. At least one of the metallic- and ceramic components comprises a matrix and the other comprises particles distributed in the matrix. The ceramic component comprises aluminum-doped zinc oxide. Independent claims are also included for: (1) producing the gradient layer on a substrate by cathode sputtering of at least two targets, comprising moving the substrate towards the target, and coating the substrate with a layer having graded composition, where the deposition of the cermet gradient layer is carried out by at least one double target, whose first target deposits the ceramic component of the cermet (ceramic target), which comprises a ceramic, and second target supplies the metallic component of the cermet (metallic target), which comprises an oxide, nitride or oxynitride of the metallic component or its metal; and (2) a device for depositing the gradient layer of the solar absorber layer system, which is arranged in a vacuum coating system, comprising at least one coating compartment (1) which comprises at least two cathodes which are respectively equipped with a target, and are present opposite to the substrate, as a coating source, a process gas conduction system for producing vacuum environment for coating process, a transport system (6) for moving the substrate with respect to the coating source, and the double target (13) for depositing the cermet gradient layer on the substrate.

机译：基板上的太阳能吸收层系统包括：在红外区域具有高反射率的基层，并布置在基板的上游;吸收层形成为梯度层，最好是具有金属和陶瓷成分的金属陶瓷梯度层，反射层设置在基层的上方，反射层设置在吸收层的上方。金属和陶瓷部件中的至少一个包括基体，另一个包括分布在基体中的颗粒。陶瓷部件包括铝掺杂的氧化锌。还包括以下独立权利要求：（1）通过阴极溅射至少两个靶材在衬底上产生梯度层，包括将衬底移向靶材，并用具有渐变成分的层涂覆衬底，其中沉积金属陶瓷梯度层由至少一个双重靶材进行，该双重靶材的第一靶材沉积包括陶瓷的金属陶瓷的陶瓷组分（陶瓷靶材），第二靶材提供金属陶瓷的金属组分（金属靶材），该金属靶材包括金属成分或其金属的氧化物，氮化物或氮氧化物; （2）用于沉积太阳能吸收器层系统的梯度层的装置，该装置设置在真空涂覆系统中，该装置包括至少一个涂覆室（1），该涂覆室包括至少两个分别装有靶的阴极，并与基材相对存在，作为涂布源，用于产生用于涂布过程的真空环境的工艺气体传导系统，用于相对于涂布源移动基材的传输系统（6）和双重靶材（13）用于在基底上沉积金属陶瓷梯度层。

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公开/公告号DE102012109691A1

专利类型
公开/公告日2014-02-06

原文格式PDF
申请/专利权人 VON ARDENNE ANLAGENTECHNIK GMBH;
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申请/专利号DE201210109691
发明设计人 FABER JOERG;REINHOLD EKKEHART;PROEHL HOLGER;
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申请日2012-10-11
分类号C23C14/06;C23C14/35;H01L31/054;H01L31/18;
国家 DE
入库时间 2022-08-21 15:37:48

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