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Method for forming selective emitter of solar cell using annealing by laser of top hat type and Method for manufacturing solar cell using the same
Method for forming selective emitter of solar cell using annealing by laser of top hat type and Method for manufacturing solar cell using the same
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机译：利用大礼帽式激光退火形成太阳能电池的选择性发射极的方法及使用该方法制造太阳能电池的方法
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摘要
A method for forming a selective emitter of solar cell using laser annealing and a method for manufacturing the solar cell using the same are provided to reduce the frequency of irradiation of laser using a top hat type laser. A silicon substrate(301) to which the impurity of the first conductivity type is doped is prepared. An insulating layer(303) in which the impurity of the second conductive type which is opposite conductive is contained is formed. The impurity within the insulating layer is injected to the upper silicon substrate and an emitter layer(302) is formed. A selective emitter is formed on the substrate on which the laser(L) is irradiated. The insulating layer is removed. The number of laser beams is corresponded to the number of finger front electrodes. The beam width of laser is greater than the width of the finger front electrode.
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