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NONLINEAR MICROSCOPE AND NONLINEAR OBSERVATION METHOD

机译:非线性显微镜和非线性观测方法

摘要

In order to increase a resolution in an optical axis direction, one aspect of a non-linear microscopy of the present invention includes an illuminating unit (20, 19) collecting an illuminating light (L1, L2) supplied from a light source (11) on a specimen (10) and making a coherent non-linear optical process takes place at a collecting point (S1); a detecting unit (27) detecting a coherent object light (Lr) occurred in the non-linear optical process and generating a signal indicating light intensity at a light detecting part; and a controlling unit (1 5, 28) scanning a specimen plane (10A) of the specimen by the collecting point and measuring a distribution of the signal on the specimen plane; in which at least one of an optical path of the illuminating light directed from the light source toward the specimen and an optical path of the object light directed from the specimen toward the light detecting part is duplicated to a pair of optical paths, and a relationship between the pair of optical paths is set to a symmetric relationship with respect to the specimen plane.
机译:为了提高在光轴方向上的分辨率,本发明的非线性显微镜的一方面包括照明单元(20、19),该照明单元(20、19)收集从光源(11)提供的照明光(L1,L2)。在样本(10)上进行相干非线性光学处理,并在收集点(S1)进行。检测单元(27)检测在非线性光学过程中发生的相干物体光(Lr),并在光检测部分产生表示光强度的信号;控制单元(1、5、28)通过收集点扫描样本的样本平面(10A),并测量信号在样本平面上的分布;其中,从光源射向标本的照明光的光路和从标本射向光检测部的物体光的光路中的至少一个与一对光路重复,并且具有以下关系:相对于样品平面,将这对光路之间的对称关系设置为对称关系。

著录项

  • 公开/公告号EP2685239A4

    专利类型

  • 公开/公告日2014-09-17

    原文格式PDF

  • 申请/专利权人 NIKON CORPORATION;

    申请/专利号EP20120755122

  • 发明设计人 FUKUTAKE NAOKI;

    申请日2012-03-07

  • 分类号G01N21/65;G01N21/64;G02B21;G02B21/06;G02B21/16;G02B21/18;G02B27/58;

  • 国家 EP

  • 入库时间 2022-08-21 15:47:15

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