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INTEGRATED OPTICAL WAVEGUIDE DEVICE COMPRISING A POLYSILICON LAYER-BASED PASSIVE OPTICAL WAVEGUIDE DEVICE IN COMBINATION WITH AN ACTIVE OPTICAL WAVEGUIDE DEVICE, AND METHOD FOR MAKING SAME
INTEGRATED OPTICAL WAVEGUIDE DEVICE COMPRISING A POLYSILICON LAYER-BASED PASSIVE OPTICAL WAVEGUIDE DEVICE IN COMBINATION WITH AN ACTIVE OPTICAL WAVEGUIDE DEVICE, AND METHOD FOR MAKING SAME
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机译：包括基于多晶硅层的无源光波导装置与有源光波导装置结合的集成光波导装置及其制造方法
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摘要
A device for coupling light into/from an integrated optical/electronic circuit disposed at least in part in a wafer having an insulator layer (152, 104) and an upper semiconductor layer that includes an optical waveguide (160). The integrated optical/electronic circuit includes at least one active optical waveguide device (150), and at least one passive optical waveguide device (800), each of which is associated with, at least in part, in the upper semiconductor layer. In one aspect, the passive optical waveguide device (800) can be created by deposing a polysilicon layer (191) on the upper semiconductor layer. In another aspect, the passive optical waveguide device can be created by etching a Total Internal reflection (TIR) boundary within the upper semiconductor layer.
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