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SYSTEM FOR CONDITIONING THE SIGNAL IN A MEMS SENSOR FOR DETECTING IN REAL TIME GEOMETRIC DISCONTINUITIES IN FERROMAGNETIC STRUCTURES.
SYSTEM FOR CONDITIONING THE SIGNAL IN A MEMS SENSOR FOR DETECTING IN REAL TIME GEOMETRIC DISCONTINUITIES IN FERROMAGNETIC STRUCTURES.
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机译：用于检测铁磁结构中实时几何不连续性的MEMS传感器中的信号处理系统。
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摘要
The invention refers to a system for conditioning the signal in a sensor of magnetic field based on MEMS technology. This system is implemented in a printed circuit board for detecting in real time the geometric discontinuities in ferromagnetic structures using the method of magnetic memory (MMM). The magnetic field sensor is operated by the Lorentz force and is integrated by a resonant structure of silicon beams (700 x 450 Ám), an aluminum loop and a bridge of Wheatstone with four piezoresistors of the p type. The system for conditioning the signal of the magnetic field sensor allows an approximately linear response to be obtained in the density range of the magnetic field of about -150 ÁT to about 150 ÁT, a resonance frequency of 14.376 kHz, a sensitivity of 4 VòT-1 and a quality factor of 96.6 at atmospheric pressure. The proposed system includes the SAUMAT virtual instrument developed in Delphi 7.net, which may process in a digital manner the PCI output in current mode or voltage mode, said output may be connected to a PLC in applications where the monitoring in real time of geometric discontinuities in ferromagnetic structures is required.
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机译：本发明涉及一种基于MEMS技术的用于调节磁场传感器中的信号的系统。该系统在印刷电路板上实现，用于使用磁存储（MMM）方法实时检测铁磁结构中的几何不连续性。磁场传感器通过洛伦兹力进行操作，并通过硅梁（700 x 450微米），铝环和惠斯通电桥与四个p型压敏电阻的谐振结构集成在一起。用于调节磁场传感器信号的系统允许在大约-150到大约150的磁场密度范围内获得近似线性的响应，谐振频率为14.376 kHz，灵敏度为4VòT- 1和在大气压下的品质因数为96.6。拟议的系统包括在Delphi 7.net中开发的SAUMAT虚拟仪器，该仪器可以以数字方式处理电流模式或电压模式下的PCI输出，在需要实时监控几何图形的应用中，所述输出可以连接到PLC在铁磁结构中需要不连续性。
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