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Enhancing accuracy of fast high-resolution X-ray diffractometry
Enhancing accuracy of fast high-resolution X-ray diffractometry
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机译:快速高分辨率X射线衍射仪的提高精度
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摘要
A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.
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