首页> 外国专利> The present invention relates to a linear drive device, a variable shutter device, a beam shaping device, a beam irradiation device, and a beam shaping device. The present invention relates to a defect correction method and a pattern substrate manufacturing method using the above.

The present invention relates to a linear drive device, a variable shutter device, a beam shaping device, a beam irradiation device, and a beam shaping device. The present invention relates to a defect correction method and a pattern substrate manufacturing method using the above.

机译：线性驱动装置，可变快门装置，光束整形装置，光束照射装置以及光束整形装置技术领域技术领域本发明涉及使用上述方法的缺陷校正方法和图案基板的制造方法。

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摘要

PROBLEM TO BE SOLVED: To provide a linear drive device having a simple configuration, a variable shutter device, a defect correction device using the same, a defect correction method, and a method for manufacturing a pattern substrate.SOLUTION: The linear drive device includes: light-transmissive portions 122 for position detection which are moved in accordance with movement of shutter plates 120; light-transmissive portions 123 provided in the shutter plates 120 and have a prescribed length in a movement direction of the shutter plates 120; a light source which emits light to the light-transmissive portions 123 and the light-transmissive portions 122 for position detection; and photodetectors 166 which detect the light from the light source through the light-transmissive portions 122 for position detection and the light-transmissive portions 123. The linear drive device moves the shutter plates 120 on the basis of the detection results of the photodetectors 166. The variable shutter device includes the linear drive device, and the defect correction device and the defect correction method use the variable shutter device.

机译：解决的问题：提供一种具有简单构造的线性驱动装置，可变快门装置，使用其的缺陷校正装置，缺陷校正方法以及用于制造图案基板的方法。解决方案：线性驱动装置包括：用于位置检测的透光部分122，其根据挡板120的移动而移动;设置在挡板120上的透光部分123在挡板120的移动方向上具有规定的长度。用于向位置检测用的透光部123和透光部122发光的光源。光电检测器166通过位置检测用透光部122和透光部123检测来自光源的光。线性驱动装置根据光电检测器166的检测结果使挡板120移动。可变快门装置包括线性驱动装置，并且缺陷校正装置和缺陷校正方法使用可变快门装置。

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公开/公告号JP5382826B2

专利类型
公开/公告日2014-01-08

原文格式PDF
申请/专利权人レーザーテック株式会社;
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申请/专利号JP20120157363
发明设计人米澤良;石川拓自;
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申请日2012-07-13
分类号G02B5/20;G02F1/13;B23K26/08;B23K26/066;B23K26/073;B23K26;
国家 JP
入库时间 2022-08-21 16:10:44

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