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Vibration gyro element, detection method of angular velocity by the vibration-type gyro sensor and vibration gyro sensor
Vibration gyro element, detection method of angular velocity by the vibration-type gyro sensor and vibration gyro sensor
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机译：振动陀螺仪元件，振动型陀螺仪传感器的角速度检测方法及振动陀螺仪传感器
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摘要
PROBLEM TO BE SOLVED: To improve the detection accuracy of an oscillation type gyro.;SOLUTION: The oscillation type gyro includes a base portion 10, a driving arm 20 extending from the base portion in a first direction within a predetermined surface, a detecting arm 30 extending from the base portion in a second direction orthogonal to the first direction within the predetermined surface, a driving electrode provided on the driving arm, and a detection electrode provided on the detecting arm. By a warp due to an electric field formed by the driving electrode, driving oscillation VA in the second direction is excited in the driving arm 20. By angle speed Ω acting about an axis in the first direction, first detecting oscillation VB in a third direction vertical to the predetermined surface is generated on the driving arm 20. The first detecting oscillation is transmitted to the detecting arm 30 through the base portion 10. On the detecting arm 30, second detecting oscillation VC corresponding to the first detection vibration VA is excited, and an electric field is generated in the detecting arm 30 due to a warp on the basis of the second detecting vibration VC. An electric charge is moved by the electric field generated in the detecting arm 30, and an electric signal due to the movement of the electric charge is outputted from the detection electrode.;COPYRIGHT: (C)2012,JPO&INPIT
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