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GAS TEMPERATURE ADJUSTMENT DEVICE, ICP MASS SPECTROSCOPE USING THE SAME, ICP SPECTROSCOPIC ANALYSER, AND MASS SPECTROSCOPE
GAS TEMPERATURE ADJUSTMENT DEVICE, ICP MASS SPECTROSCOPE USING THE SAME, ICP SPECTROSCOPIC ANALYSER, AND MASS SPECTROSCOPE
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机译:气体温度调节装置,使用该装置的ICP质谱仪,ICP光谱分析仪和质谱仪
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摘要
PROBLEM TO BE SOLVED: To provide a gas temperature adjustment device that can utilize a resin tube of low heat resistance as a gas pipe, is small, hardly causes temperature unevenness, and is easily assembled.;SOLUTION: In the gas temperature adjustment device, a spirally wound pipe 4 supported in non-contact with a housing 1 by a frame body is disposed inside the housing 1 in which a heater 2 driven and controlled by a temperature adjustment circuit 3 is attached on a wall body (e.g. bottom plate 1b). The gas temperature adjustment device includes a stirring device 6 for stirring the atmosphere in the housing 1. The pipe 4 having a long flow channel is accommodated in the small-sized housing 1. Thus, the gas temperature adjustment device can be made compact, and can stably and accurately keep the temperature of the gas flowing in the pipe 4 at a set temperature.;COPYRIGHT: (C)2014,JPO&INPIT
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