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SYSTEM AND METHOD FOR PRODUCING BUBBLE FREE LIQUIDS FOR NANOMETER SCALE SEMICONDUCTOR PROCESSING
SYSTEM AND METHOD FOR PRODUCING BUBBLE FREE LIQUIDS FOR NANOMETER SCALE SEMICONDUCTOR PROCESSING
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机译:生产用于纳米级半导体加工的无气泡液体的系统和方法
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摘要
The system for producing a weapon poaek include continuous liquid source and de- bubbling chamber. Di bubbling chamber includes an outlet and inlet . Inlet is coupled to the outlet of the continuous liquid source by a supply pipe . In addition , de- bubbling chamber includes at least one port to the bubbling chamber side wall de . At least one port is an inlet from the length L or more of di- bubbling chamber . In addition , a method for producing an inorganic poaek .
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