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SYSTEM AND METHOD FOR PRODUCING BUBBLE FREE LIQUIDS FOR NANOMETER SCALE SEMICONDUCTOR PROCESSING
SYSTEM AND METHOD FOR PRODUCING BUBBLE FREE LIQUIDS FOR NANOMETER SCALE SEMICONDUCTOR PROCESSING
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机译:生产用于纳米级半导体加工的无气泡液体的系统和方法
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摘要
A SYSTEM FOR PRODUCING BUBBLE FREE LIQUID INCLUDES A CONTINUOUS LIQUID SOURCE (102') AND A DE-BUBBLING CHAMBER (L04). THE DE-BUBBLING CHAMBER INCLUDES AN OUTLET (L08) AND AN INLET (112). THE INLET COUPLED TO AN OUTLET OF THE CONTINUOUS LIQUID SOURCE BY A SUPPLY PIPE (106). THE DE-BUBBLING CHAMBER ALSO INCLUDES AT LEAST ONE PORT (110A-110C) IN A SIDEWALL (104A) OF THE DE-BUBBLING CHAMBER. THE AT LEAST ONE PORT BEING AT LEAST A LENGTH L FROM THE INLET OF THE DE-BUBBLING CHAMBER. A METHOD FOR PRODUCING BUBBLE FREE LIQUID IS ALSO DESCRIBED. FIG.3
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