首页> 外国专利> SYSTEM AND METHOD FOR PRODUCING BUBBLE FREE LIQUIDS FOR NANOMETER SCALE SEMICONDUCTOR PROCESSING

SYSTEM AND METHOD FOR PRODUCING BUBBLE FREE LIQUIDS FOR NANOMETER SCALE SEMICONDUCTOR PROCESSING

机译:生产用于纳米级半导体加工的无气泡液体的系统和方法

摘要

A SYSTEM FOR PRODUCING BUBBLE FREE LIQUID INCLUDES A CONTINUOUS LIQUID SOURCE (102') AND A DE-BUBBLING CHAMBER (L04). THE DE-BUBBLING CHAMBER INCLUDES AN OUTLET (L08) AND AN INLET (112). THE INLET COUPLED TO AN OUTLET OF THE CONTINUOUS LIQUID SOURCE BY A SUPPLY PIPE (106). THE DE-BUBBLING CHAMBER ALSO INCLUDES AT LEAST ONE PORT (110A-110C) IN A SIDEWALL (104A) OF THE DE-BUBBLING CHAMBER. THE AT LEAST ONE PORT BEING AT LEAST A LENGTH L FROM THE INLET OF THE DE-BUBBLING CHAMBER. A METHOD FOR PRODUCING BUBBLE FREE LIQUID IS ALSO DESCRIBED. FIG.3
机译:用于产生气泡的自由液体的系统包括连续的液体源(102')和去泡室(L04)。除泡室包括出口(L08)和入口(112)。入口通过供应管(106)耦合到连续液体源的出口。除泡室还包括除泡室的侧壁(104A)中的至少一个端口(110A-110C)。至少一个端口距消泡室入口至少L的距离。还描述了一种生产气泡自由液体的方法。图3

著录项

  • 公开/公告号MY141072A

    专利类型

  • 公开/公告日2010-03-15

    原文格式PDF

  • 申请/专利权人 LAM RES CORP;

    申请/专利号MY2006PI03115

  • 发明设计人 JEFFREY J. FARBER;CARLS WOODS;

    申请日2006-06-29

  • 分类号B01D19/00;

  • 国家 MY

  • 入库时间 2022-08-21 18:44:35

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