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LOWER LINER WITH INTEGRATED FLOW EQUALIZER AND IMPROVED CONDUCTANCE
LOWER LINER WITH INTEGRATED FLOW EQUALIZER AND IMPROVED CONDUCTANCE
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机译:具有集成式流动均衡器的下衬套和改进的电导率
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摘要
The processing chamber has a bottom liner with an integrated flow equalizer. In the etching process , The process gas can be sucked from the treatment chamber unevenly , which can result in non-uniform etching of the substrate . An integrated flow equalizer is configured to equalize the flow of exhaust gas to be treated into the chamber through the lower liner .
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