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LOWER LINER WITH INTEGRATED FLOW EQUALIZER AND IMPROVED CONDUCTANCE

机译:具有集成式流动均衡器的下衬套和改进的电导率

摘要

The processing chamber has a bottom liner with an integrated flow equalizer. In the etching process , The process gas can be sucked from the treatment chamber unevenly , which can result in non-uniform etching of the substrate . An integrated flow equalizer is configured to equalize the flow of exhaust gas to be treated into the chamber through the lower liner .
机译:处理室的底部衬里带有集成的流量均衡器。在蚀刻工艺中,工艺气体可能会不均匀地从处理室中吸入,这可能导致基板蚀刻不均匀。集成的流量均衡器配置为均衡要通过下衬套进入腔室的待处理废气的流量。

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