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METHOD FOR PRODUCING AN INTEGRATED MICROFLUIDIC SYSTEM AND INTEGRATED MICROFLUIDIC SYSTEM
METHOD FOR PRODUCING AN INTEGRATED MICROFLUIDIC SYSTEM AND INTEGRATED MICROFLUIDIC SYSTEM
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机译:集成微流体系统的生产方法和集成微流体系统
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摘要
The invention relates to the production of an integrated microfluidic system and to the integrated microfluidic system as such. An electronics substrate, especially a semiconductor chip, is connected to a microfluidic substrate in a flip-chip configuration. For this purpose, the fluidic connecting elements of the two substrates to be interconnected are interconnected by a first adhesive and the electrical contacts of the two substrates are interconnected by a second adhesive. The adhesives are cured, the second adhesive curing first.
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