PROBLEM TO BE SOLVED: To provide a high performance bolometer type THz wave detector to be manufactured at a high yield.;SOLUTION: In a bolometer type THz wave detector 1 of a microbridge structure in which a temperature detection part 14 (diaphragm) containing a bolometer thin film 7 is supported by a support part 13 in such a state that it is floated from a circuit substrate 2, and a member (dielectric cover 11) made of a dielectric material for efficiently collecting the THz wave is added to an upper part of the temperature detection part 14. It is set so that ntλ, where n is the refractive index of the dielectric cover 11, t is the thickness, and λ is the wavelength of the THz wave. Further, a gap between the dielectric cover 11 and the temperature detection part 14 is set at an integer multiple of λ/2. An absorption rate of the THz wave is much improved thereby, while utilizing the structure and the manufacturing technique of a bolometer type infrared detector, and the high performance bolometer type THz wave detector is manufactured at a high yield.;COPYRIGHT: (C)2009,JPO&INPIT
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