首页> 外国专利> MOLD FOR FINE STRUCTURE TRANSFER, SURFACE FINE STRUCTURE MEMBER, METHOD FOR PRODUCING FINE STRUCTURE TRANSFER, AND METHOD FOR PRODUCING SURFACE FINE STRUCTURE MEMBER

MOLD FOR FINE STRUCTURE TRANSFER, SURFACE FINE STRUCTURE MEMBER, METHOD FOR PRODUCING FINE STRUCTURE TRANSFER, AND METHOD FOR PRODUCING SURFACE FINE STRUCTURE MEMBER

机译:用于精细结构转移的模具,表面精细结构成员,用于产生精细结构转移的方法以及用于制造表面精细结构成员的方法

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a mold excellent in the degree of freedom of processing and a surface fine structure member obtained by using the mold.;SOLUTION: The mold (10) is patterned by irradiating a resist layer with laser beams after the resist layer is formed on the surface of a roll. In the mold (10) thus obtained, at least two pattern parts (10a-10d) are provided along the periphery of the roll-shaped mold (10), and they are arranged in parallel to each other. In the pattern parts (10a-10d), fine structures are formed on the periphery of the mold (10), and the size of the fine structure composing each pattern part (10a-10d) is 1 μm or below.;COPYRIGHT: (C)2013,JPO&INPIT
机译:解决的问题:提供一种生产加工自由度优异的模具的方法以及使用该模具获得的表面精细结构构件。解决方案:通过用激光照射抗蚀剂层来对模具(10)进行构图。在辊的表面上形成抗蚀剂层之后的光束。在如此获得的模具(10)中,沿着辊状模具(10)的外围设置至少两个图案部分(10a-10d),并且它们彼此平行地布置。在图案部分(10a-10d)中,在模具(10)的外围形成精细结构,并且构成每个图案部分(10a-10d)的精细结构的尺寸为1μm或更小。 C)2013,日本特许厅

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号