首页> 外国专利> Integrated device for manufacturing chalcopyrite-type thin-film solar cell for photovoltaic-field, has distributor module conveying substrate from one process module into another process module under defined atmospheric conditions

Integrated device for manufacturing chalcopyrite-type thin-film solar cell for photovoltaic-field, has distributor module conveying substrate from one process module into another process module under defined atmospheric conditions

机译：用于制造用于光伏场的黄铜矿型薄膜太阳能电池的集成装置，具有分配器模块，该分配器模块在限定的大气条件下将基板从一个处理模块传送到另一处理模块中

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摘要

The device has a substrate-lock (11) for supplying a substrate into the device, and multiple process modules (1-8) for performing necessary process steps for manufacturing a thin-film solar cell. A distributor module (10) conveys the substrate processed in one of the process modules in the other process module such that a transport is carried-out between the process modules and the distributor module under defined atmospheric conditions. The process modules consist of a coating module, a thermal treating module and/or a laser module for patterning process. An independent claim is also included for a method for manufacturing a chalcopyrite-type thin-film solar cell.

机译：该装置具有用于将基板供应到装置中的基板锁（11），以及用于执行用于制造薄膜太阳能电池的必要处理步骤的多个处理模块（1-8）。分配器模块（10）输送在另一个处理模块中的一个处理模块中处理的基板，从而在限定的大气条件下在处理模块和分配器模块之间进行运输。处理模块包括用于图案化处理的涂覆模块，热处理模块和/或激光模块。还包括用于制造黄铜矿型薄膜太阳能电池的方法的独立权利要求。

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公开/公告号DE102011009131A1

专利类型
公开/公告日2012-07-26

原文格式PDF
申请/专利权人 SINGULUS TECHNOLOGIES AG;
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申请/专利号DE20111009131
发明设计人 KOLOVOS-VELLIANITIS DIONYSIOS;HERGENROETHER JENS;CORD BERNHARD;
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申请日2011-01-21
分类号H01L31/18;H01L21/677;
国家 DE
入库时间 2022-08-21 17:05:01

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