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Edge-emitting semiconductor laser manufacturing method, involves monolithically integrating laser diodes on common growth substrate, where laser diodes emit radiation of different wavelengths

机译:边缘发射半导体激光器的制造方法,涉及在公共生长衬底上单片集成激光二极管,其中激光二极管发出不同波长的辐射

摘要

The method involves providing a common growth substrate (1), and monolithically integrating laser diodes (2, 3) on the common growth substrate, where the laser diodes emit radiation of different wavelengths. The wavelength of the emitted radiation of the laser diodes is greater than 10 nanometer. Individual layers of the laser diodes are matched together. The substrate is covered by the layers of the laser diodes. The laser diodes are provided with a bar wave guide manufactured by an etching process.
机译:该方法包括提供公共生长衬底(1),以及在公共生长衬底上单片集成激光二极管(2、3),其中激光二极管发出不同波长的辐射。激光二极管的发射辐射的波长大于10纳米。激光二极管的各个层匹配在一起。衬底被激光二极管的层覆盖。激光二极管设置有通过蚀刻工艺制造的条形波导。

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