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METHOD FOR PRODUCING CURED RESIST USING NEGATIVE PHOTOSENSITIVE RESIN LAMINATE, NEGATIVE PHOTOSENSITIVE RESIN LAMINATE, AND USE OF NEGATIVE PHOTOSENSITIVE RESIN LAMINATE
METHOD FOR PRODUCING CURED RESIST USING NEGATIVE PHOTOSENSITIVE RESIN LAMINATE, NEGATIVE PHOTOSENSITIVE RESIN LAMINATE, AND USE OF NEGATIVE PHOTOSENSITIVE RESIN LAMINATE
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机译：负性光敏树脂层压板，负性光敏树脂层压板和使用负性光敏树脂层压板生产固化电阻的方法
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摘要
Provides adhesion, and the resolution to obtain an excellent resist pattern and excellent resist shape, resist cured production method, use of the negative-type photosensitive resin laminate, and a negative-type photosensitive resin laminate after the development. Water production method resist hardening according to the present invention, at least the support (A) and the negative-type photosensitive resin layer (B) and the substrate laminate (C) forming a negative photosensitive resin laminate comprising a stacked body forming step, a picture an exposure step for exposing the negative type photosensitive resin layer (B) through the lens using a light that projects an image of a mask and by removing developing the unexposed portion of the negative photosensitive resin layer (B), the negative photosensitive resin curing comprises a developing step of forming a resist cured, and formed of parts of the negative-type photosensitive resin layer (B) light transmittance is 25% or more ways than the resist cured 50% of the water produced at a wavelength of 365 ㎚ of the (B) to be. ;
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