首页> 外国专利> DIGITAL EXPOSURE DEVICE FOR A FLEXIBLE SUBSTRATE AND AN EXPOSURE METHOD OF THE SAME CAPABLE OF RAPIDLY EXPOSING LARGE SIZED FLEXIBLE SUBSTRATES WITHOUT INTERRUPTION BY USING ALIGNMENT MARKS AND CAD DATA

DIGITAL EXPOSURE DEVICE FOR A FLEXIBLE SUBSTRATE AND AN EXPOSURE METHOD OF THE SAME CAPABLE OF RAPIDLY EXPOSING LARGE SIZED FLEXIBLE SUBSTRATES WITHOUT INTERRUPTION BY USING ALIGNMENT MARKS AND CAD DATA

机译:柔性基板的数字曝光设备和使用对准标记和CAD数据可以不间断地快速曝光大型柔性基板的相同曝光方法

摘要

PURPOSE: A digital exposure device for a flexible substrate and an exposure method of the same are provided to reduce tact time by automatically aligning a large sized flexible substrate and exposing the substrate without replacing the substrate and a mask.;CONSTITUTION: A digital exposure device(100) includes a first substrate adjusting part(110), a vision camera part(130), a digital optical part(140), and a second substrate adjusting part(150). The vision camera part recognizes a plurality of alignment marks on a flexible substrate and transmits controlling signals to an aligning stage part(125) in order to automatically align the flexible substrate. The digital optical part receives digital data corresponding to exposure patterns of the flexible substrate. The flexible substrate is irradiated with ultraviolet rays and reflects the ultraviolet rays based on the digital data. The second substrate adjusting part maintains and winds the exposed flexible substrate.;COPYRIGHT KIPO 2012
机译:目的:提供一种用于柔性基板的数字曝光装置及其曝光方法,以通过自动对准大尺寸的柔性基板并在不更换基板和掩模的情况下曝光基板来缩短节拍时间;构成:一种数字曝光装置(100)包括第一基板调整部(110),摄像机部(130),数字光学部(140)和第二基板调整部(150)。视觉摄像机部件识别柔性基板上的多个对准标记,并且将控制信号传输到对准台部件(125),以便自动对准柔性基板。数字光学部件接收与柔性基板的曝光图案相对应的数字数据。柔性基板被紫外线照射并基于数字数据反射紫外线。第二个基板调整部件用于维护和缠绕裸露的柔性基板。; COPYRIGHT KIPO 2012

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