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SEMICONDUCTOR CHIP WITH A TSV(THROUGH SILICON VIA) AND MULTI CHIP PACKAGE INCLUDING THE SAME
SEMICONDUCTOR CHIP WITH A TSV(THROUGH SILICON VIA) AND MULTI CHIP PACKAGE INCLUDING THE SAME
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机译:具有通孔硅通孔(TSA)的半导体芯片(包括硅通孔)和多芯片封装,包括相同的芯片
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摘要
PURPOSE: A semiconductor chip and a multi chip package including the same are provided to considerably improve the signal transmission speed between multilayer chips by minimizing the parasitic capacitance between a semiconductor chip and an interface member.;CONSTITUTION: An interface member(150) is formed through a semiconductor substrate(100). The interface member is electrically connected to an external signal transmission terminal. The interface member includes a through via and a via plug buried in the through via. A backward diode is formed between the semiconductor substrate and the interface member.;COPYRIGHT KIPO 2012
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