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GRID STRUCTURE FOR TRANSMISSION ELECTRON MICROSCOPE OBSERVATION AND A MANUFACTURING METHOD THEREOF CAPABLE OF SUPPORTING AN OBSERVATION TARGET
GRID STRUCTURE FOR TRANSMISSION ELECTRON MICROSCOPE OBSERVATION AND A MANUFACTURING METHOD THEREOF CAPABLE OF SUPPORTING AN OBSERVATION TARGET
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机译：透射电子显微镜观测的网格结构及其支持观测目标的制造方法
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摘要
PURPOSE: A grid structure for transmission electron microscope observation and a manufacturing method thereof are provided to prevent omission of a sample by using a graphene film as a sample supporter.;CONSTITUTION: A grid mesh(10) is woven as a grid shape. A graphene film(20) locates on the grid mesh. The graphene film supports a sample. A fixed holder(30) fixes the grid mesh and the edge of the graphene film. The graphene film comprises at least one among single layer graphene, double layered grapheme, and multilayer grapheme. A metal catalyst is formed on a silicon wafer in which a silicon oxide film is formed. The graphene film is formed by synthesizing grapheme to the metal catalyst with a thermal chemistry vapor deposition method. The graphene film is separated from the metal catalyst. The graphene film is transferred to the grid mesh.;COPYRIGHT KIPO 2012
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